화학공학소재연구정보센터
Journal of Vacuum Science & Technology B, Vol.28, No.2, C2D22-C2D25, 2010
Development of a CdTe x-ray imaging device driven by a vertical thin film field emission array
The authors describe a novel CdTe x-ray imaging device that is driven by an electron beam from a field-emitter array. This CdTe x-ray imaging device comprises a CdTe Schottky diode with a vertical thin-film field-emitter array (VTF-FEA). The VTF-FEA was fabricated by an ion-induced bending process and an etch-back technique. The output signal from the detector was obtained through the recombination of x-ray-generated holes and electrons emitted from the VTF-FEA. The output signal clearly depended on the intensity of the x-ray beam. The shape of a Cu plate was successfully detected by the VTF-FEA-driven CdTe diode.