Treatment with oxygen-containing plasma is an essential step for the fabrication of devices containing components of polydimethylsiloxane (PDMS). Such oxidative treatment chemically modifies the surface of PDMS allowing it to permanently adhere to glass. quartz, PDMS and other silica-based substrates. Overexposure of PDMS to oxidative gas plasma, however, compromises its adhesiveness. Therefore, regulation of the duration and the conditions of the plasma treatment is crucial for achieving sufficient surface activation without overoxidation. Using a semiquantitative ternary approach, we evaluated the quality of adhesion (QA) between flat PDMS and glass substrates pretreated with oxygen plasma under a range of different conditions. The quality of adhesion manifested good correlation trends with the surface properties of the pretreated PDMS. Examination of the QA dependence on the treatment duration and on the pressure and the RF power of the plasma revealed a range of oxidative conditions that allowed for permanent adhesion with quantitative yields.