PMN-PT 68/32 thin films have been prepared on Pt/Si, ITO coated glass, stainless steel and silicon substrates in the identical processing conditions by sol-gel process. Annealing temperature of 600 degrees C was ascertained by thermo gravimetric analysis (TGA) study of the dried sol-gel powder of PMNT-PT 68/32 composition. X-ray diffraction (XRD) study showed similar to 95% perovskite phase formation on Pt/Si and ITO coated glass substrates. SEM micrographs showed the formation of sub micron size grains on Pt/Si and ITO coated glass substrates. Diffuse phase transition with transition temperature (T-c)similar to 190 degrees C was observed in 0.8 mu m thick PMN-PT 68/32 films deposited on Pt/Si and ITO coated glass substrates. (c) 2007 Elsevier B.V. All rights reserved.