Strontium titanate (STO) is a promising candidate as a high-k dielectric for dynamic random access memory application. STO thin films are deposited by atomic layer deposition using Sr((Bu3Cp)-Bu-t)(2), Ti(OMe)(4), and H2O as precursors. Growth and saturation behavior of STO and binary oxides are evaluated by ellipsometry thickness measurements. The precursor pulse ratio controls the amount of Sr and Ti incorporated in STO films. Stoichiometric SrTiO3 is characterized by the lowest crystallization temperature and largest refractive index, density, and dielectric constant. An excess of Ti or Sr results in an increase in the crystallization onset temperature and contraction or expansion of the cubic cell constant of perovskite SrTiO3. Incorporation of more Sr in STO reduces the leakage current density but also increases the capacitance-equivalent thickness. (C) 2009 The Electrochemical Society. [DOI: 10.1149/1.3244213] All rights reserved.