화학공학소재연구정보센터
Solid-State Electronics, Vol.52, No.11, 1778-1781, 2008
A high Schottky barrier between Ni and S-passivated n-type Si(100) surface
By minimizing surface states with sulfur passivation, a record-high Schottky barrier is achieved with nickel on n-type Si(100) surface. Capacitance-voltage measurements yield a flat-band barrier height of 0.97 eV. Activation-energy and current-voltage measurements indicate similar to 0.2-eV lower barriers for the Ni/Si(100) junction. These results accompany a previously-reported record-high Schottky barrier of 1.1 eV between aluminum and S-passivated p-type Si(100) surface. The operation of these metal/Si(100) junctions changes from majority-carrier conduction, i.e., a Schottky junction, to minority-carrier conduction, i.e., a p-n junction, with the increase in barrier height from 0.97 eV to 1.1 eV. Temperature-dependent current-voltage measurements reveal that the Ni/S-passivated n-type Si(100) junction is stable up to 110 degrees C. (C) 2008 Elsevier Ltd. All rights reserved.