Solid-State Electronics, Vol.53, No.3, 256-265, 2009
Unified analytical threshold voltage model for non-uniformly doped dual metal gate fully depleted silicon-on-insulator MOSFETs
The paper describes the unified analytical threshold voltage model for non-uniformly doped, dual metal gate (DMG) fully depleted silicon-on-insulator (FDSOI) MOSFETs based on the solution of 2D Poisson's equation. 2D Poisson's equation is solved analytically for appropriate boundary conditions using separation of variables technique. The solution is then extended to obtain the threshold voltage of the FDSOI MOSFET. The model is able to handle any kind of non-uniform doping, viz. vertical, lateral as well as laterally asymetric channel (LAC) profile in the SOI film in addition to the DMG structure. The analytical results are validated with the numerical simulations using the device simulator MEDICI. (C) 2009 Elsevier Ltd. All rights reserved.
Keywords:Analytical model;Non-uniform doping;Laterally asymetric channel (LAC);Dual metal gate (DMG);Fully depleted silicon-on-insulator (FDSOI);MOSFETs