Solid-State Electronics, Vol.54, No.4, 417-419, 2010
SixGey:H-based micro-bolometers studied in the terahertz frequency range
SiGe-based bolometers originally designed for infrared operation have been tested as detectors of terahertz radiation. The obtained values of the responsivity and noise equivalent power show that these detectors can compete with conventional room temperature detectors such as pyroelectric detectors and Golay cells having an advantage in their compatibility with the CMOS technology. (C) 2009 Elsevier Ltd. All rights reserved.