화학공학소재연구정보센터
Solid-State Electronics, Vol.54, No.9, 935-941, 2010
Asymmetrically strained all-silicon multi-gate n-Tunnel FETs
This paper reports all-silicon asymmetrically strained Tunnel FET architectures that feature improved subthreshold swing and I-on/I-off characteristics. We demonstrate that a lateral strain profile corresponding to at least 0.2 eV band-gap shrinkage at the BTB source junction could act as an optimized performance Tunnel FET enabling the cancellation of the drain threshold voltage. To implement a real device, we demonstrate using GAA Si NW with asymmetric strain profile using two local stressor technologies to have >4-5 GPa peak of lateral uniaxial tensile stress in the Si NW. (C) 2010 Elsevier Ltd. All rights reserved.