Advanced Materials, Vol.22, No.16, 1840-1840, 2010
Contact-Printed Microelectromechanical Systems
A process for rapid fabrication of metallic M EMS (microelectromechanical systems) without lithographic processing is presented. Using dimensionally scalable contact printing, 3D electromechanical structures (see figure) are fabricated and functionally tested. Flexible, paper-thin device arrays produced by this method may enable such applications as pressure sensing skins for people and vehicles, phased array detectors for acoustic imaging, and novel adaptive-texture display applications.