화학공학소재연구정보센터
Advanced Materials, Vol.22, No.22, 2416-2416, 2010
Optically Selective Microlens Photomasks Using Self-Assembled Smectic Liquid Crystal Defect Arrays
A photomask that combines two imaging elements (microlens arrays and clear windows) in one structure has been developed by using toric focal conic domain (TFCD) micro arrays of smectic liquid crystals. Their application as optically selective photomasks by simply adjusting (i) the illumination dose, (ii) the size of TFCD array mask, and (iii) the tone of photoresist (PR) is demonstrated (see figure).