화학공학소재연구정보센터
Applied Surface Science, Vol.256, No.6, 1812-1816, 2010
Band gap energy and bowing parameter of In-rich InAlN films grown by magnetron sputtering
The crystal structure, band gap energy and bowing parameter of In-rich InxAl1-xN (0.7 < x < 1.0) films grown by magnetron sputtering were investigated. Band gap energies of InxAl1-xN films were obtained from absorption spectra. Band gap tailing due to compositional fluctuation in the films was observed. The band gap of the as-grown InN measured by optical absorption method is 1.34 eV, which is larger than the reported 0.7 eV for pure InN prepared by molecular beamepitaxy (MBE) method. This could be explained by the Burstein-Moss effect under carrier concentration of 10(20) cm(-3) of our sputtered films. The bowing parameter of 3.68 eV is obtained for our InxAl1-xN film which is consistent with the previous experimental reports and theoretical calculations. (C) 2009 Elsevier B. V. All rights reserved.