Vertically aligned carbon nanotubes were prepared by Plasma enhanced chemical vapor deposition (PECVD) on inexpensive Corning glass substrates using different under layers. The samples were functionalised by a simple 1H,1H-2H,2H perfluorodecyl-trichlorosilane (FDTS) and hexane mixture. The surface roughness of the CNTs and protective FDTS coating provides an ideal hydrophobic surface of around 141 degrees. Auger spectroscopy analysis was performed to confirm fluorination of the sample. It was also found titanium provides a suitable under layer support for Ni catalyst due to the wetability of the two elements. (C) 2010 Elsevier B.V. All rights reserved.