Information on depth distribution of molecular vibrational modes of an organic multilayer device has been obtained by surface-enhanced Raman scattering (SERS) applied to a low-angle beveled surface which was prepared by gradient shaving preparation. We achieved a depth resolution of nearly 5 nm in terms of the decay length of the organic species at the interfaces. Encapsulation with a glass cap after metal deposition in nitrogen atmosphere gives reproducible SER spectra even at 1-mu m range. (C) 2010 Elsevier B.V. All rights reserved.