Diarylethene monolayer was fabricated on a quartz-glass substrate using a silane coupling technique. The coupling agent was easily prepared from a diarylethene with a hydroxy group and 3-aminopropyltriethoxysilane. It was found that the chromophore was introduced in high density on the substrate and still exhibited reversible photochromism with relatively high conversion upon photoirradiation despite being constrained on the quartz-glass surface.