SiC-coated film onto carbon fibers as a barrier of oxidation resistance and reaction between carbon fibers and metals was investigated. The chemical vapor deposition of silicon carbide onto carbon fibers was performed at various temperatures ranging from 700 to 1000℃ using trilsopropylsilane vapor carried by hydrogen gas. The strength of the SiC-coated carbon fibers was decreased due to deterioration of fibers and chemical attack of hydrogen on the surface of carbon fibers during the coating process. The oxidation and the thermal resistance of the SiC-coated carbon fibers compared to the uncoated carbon fibers were improved at temperature range of 600-800℃ and 1000-1200℃, respectively. Morphological change by air oxidation at temperature range of 500-800℃ was also investigated for the SiC-coated and the uncoated carbon fibers, respectively. The SiC-coated film between carbon fiber and aluminum was sufficient as a barrier of reaction on carbon fiber reinforced aluminum at temperature of above 1000℃.