화학공학소재연구정보센터
Journal of Crystal Growth, Vol.312, No.12-13, 1925-1928, 2010
Fabrication of pure-perovskite PMN-PT thin films on SrTiO3 substrates using pulsed laser deposition
Lead magnesium niobate-lead titanate ((1 -x)Pb(Mg1/3Nb2/3)O-3-xPbTiO(3) (x=0.20,0.33,0.50), PMN-PT) thin films have been successfully deposited on SrTiO3(1 0 0) substrates by pulsed laser deposition (PLD). The result of X-ray diffraction (XRD) showed that the PMN-PT thin films were c-orientated. The effects of deposition conditions, such as deposition temperature, deposition oxygen pressure, pulsed laser repeated frequency, cooling rate, pulsed laser energy and post annealing, were studied first on thin-film quality. It was found that the deposition temperature was very different for the different mole fractions of the thin films. The range of the deposition temperature of high-qualitied thin films is very narrow, about +/- 2 degrees C. Such harsh conditions are rare in other thin films, which is also the main reason why PMN-PT thin films are very difficult to prepare. (C) 2010 Published by Elsevier B.V.