화학공학소재연구정보센터
Journal of Crystal Growth, Vol.312, No.21, 3198-3203, 2010
Numerical study of induction heating in melt growth systems-Frequency selection
A set of 2D finite element numerical simulation of induction heating process for an oxide Czochralski crystal growth system has been made for a range of f=1-100 kHz applied frequency of driving current. It was shown that the frequency selection has a marked effect in all basic induction phenomena, including electromagnetic field distribution, skin depth, coil efficiency, and intensity and structure of heating in the growth setup. (C) 2010 Elsevier B.V. All rights reserved.