화학공학소재연구정보센터
Journal of Crystal Growth, Vol.316, No.1, 51-55, 2011
Plasma-assisted electroepitaxy as a method for the growth of GaN layers
In the current study we have demonstrated the feasibility of a novel approach for the growth of the GaN layers namely plasma-assisted electroepitaxy (PAEE). In this method, we have tried to combine advantages of the plasma process for producing high concentrations of active N species in the Ga melt with the advantages of electroepitaxy in transferring the N species from the Ga surface to the growth interface without spontaneous crystallization on the surface or within the solution. We have designed and built a new growth chamber which allows us to combine the Molecular Beam Epitaxy process with a Liquid Phase Electroepitaxy system. We have demonstrated that it is possible to grow GaN layers by PAEE at growth temperatures as low as similar to 500 degrees C and with low nitrogen overpressures of similar to 3 x 10(-5) Torr. We have shown that the combination of the two processes, an N-plasma flux and a DC current, are vital for the successful growth of GaN layers by PAEE. The exact mechanisms, which lead to the growth of GaN by PAEE, still need to be investigated. (C) 2011 Elsevier B.V. All rights reserved.