Automated high resolution electron backscatter diffraction was used to map the local crystallographic texture of Pt and PbZr1-x Ti (x) O-3 (PZT) thin films with a resolution as high as 5 nm. The Pt and PZT films consisted of 99.9% and 94.3% {111} textured grains (i.e., with (111) planes parallel to the substrate surface), respectively. The average Pt and PZT grain sizes were 46 +/- A 30 nm and 65 +/- A 30 nm, respectively. Quantification of misorientation distributions and the fraction of non-{111}-textured grains demonstrates the potential of this local texture measurement method for quantifying the ferroelectric variability limits of PZT-based capacitors.