화학공학소재연구정보센터
Journal of Materials Science, Vol.46, No.1, 183-187, 2011
UV laser ablation of parylene films from gold substrates
Parylene coatings on gold substrates were removed by laser ablation using 248-nm light from an excimer laser. Each sample was processed by a different number of pulses in one of three environments: air at atmospheric pressure, nitrogen at atmospheric pressure, and vacuum. The laser-induced craters were analyzed by optical microscopy and X-ray photoelectron spectroscopy. Multi-pulse ablation thresholds of gold and parylene were determined.