Behavior of electrical resistance was examined in room temperature and elevated temperatures up to 1000 A degrees C for two types of SiCCVD fibers with diameters of 140 and 70 mu m, respectively. The results showed that electrical resistance showed a good linear relationship with the length of fibers. Electrical resistance decreased as temperature increased, besides, temperature coefficient of electrical resistance was a minus constant, -5.2 x 10(-4) A degrees C-1 except that in the first heating. In the first heating, electrical resistance and temperature coefficient increased and had a peak in the range of 550-700 A degrees C owing to the burning of the carbon-rich layer on the fiber surface. It suggested that behavior of electrical resistance of the fibers depended mainly on the carbon core and the carbon-rich layer. It was confirmed that SiCCVD fiber could be used as heating elements for micro-heater and finally a micro-heater using SiCCVD fiber as heating elements was developed.