In this work, a micro-temperature sensor on a 40 mu m flexible stainless-steel substrate was fabricated using micro-electro-mechanical systems (MEMS). Embedding a micro-temperature sensor in a proton exchange membrane fuel cell (PEMFC) to monitor temperature will not damage the sensor during the experimental process. This investigation is the first to develop a micro-temperature sensor that can be placed anywhere between the membrane electrode assembly (MEA) and the flow-channel plate inside a PEMFC. The simulated temperature is consistent with the experimentally determined temperature. The performance curve is also consistent with experimental results, revealing the accuracy of the simulation and the effectiveness of monitoring temperature inside a PEMFC. (C) 2010 Elsevier B.V. All rights reserved.