Anodically etching macropores in Si substrates followed by chemical over-etching and Cu galvanics allows producing Si nanowire anodes for Li ion batteries with optimized geometry. This paper focuses on the optimizations of the process chain. The times for key processes could be substantially reduced while concomitantly improving the quality and the process window. The process chain now is close to enabling mass production on 200 mm wafers. (C) 2011 The Electrochemical Society. [DOI: 10.1149/1.3561661] All rights reserved.