화학공학소재연구정보센터
Journal of Vacuum Science & Technology A, Vol.28, No.4, 838-841, 2010
Synergistic Ag (111) and Cu (111) texture evolution in phase-segregated Cu1-xAgx magnetron sputtered composite thin films
The authors investigated the texture and microstructure evolution of Cu1-xAgx composite thin films through x-ray diffraction pole figures as a function of composition for x <= 0.5. As codeposited at room temperature by magnetron sputtering, the fcc nanocomposite Cu1-xAgx forms a phase-segregated thin film, when the Ag volume fraction represents more than 15 at. % up to 50 at. %, and a single phase thin film when the Ag volume fraction represents less than 15 at. %. Comparison between texture evolutions of Cu (111) and Ag (111) in phase-segregated Cu-Ag thin films and Cu (111) and Ag (111) in the same thickness pure copper or silver thin films shows that texture selection in each phase evolves in two different modes during microstructure evolution. First, a stronger perpendicular (111) fiber texture is obtained in the phase-segregated films than in the pure Cu or Ag films. Second, biaxial crystallographic alignment is observed for the Ag component that develops an in-plane alignment of Ag (200) related to the deposition direction. By the use of transmission electron microscopy we found that development of Cu (111) and Ag (111) textures does not correlate to the in-plane grain size differences observed for the different compositions of Cu1-xAgx thin films. (C) 2010 American Vacuum Society. [DOI: 10.1116/1.3319349]