APPLICATION OF SILICALITE-1 FILM TO A SURFACE ACOUSTIC WAVE DEVICE SENSOR

Jung MK; Hong SS; Kim MH

Korean Journal of Chemical Engineering, Vol.15, No.5, 552-555, September, 1998

Preparation of silicalite film on a single crystal quartz and its application as a SAW device were investigated. A layer of silicalite crystals was synthesized on a delay line in an interdigital transducer having a dual delay line configuration through the vapor phase transport method. To study the sensitivity and selectivity as a chemical sensor, the SAW sensor was tested in N₂ flow containing vapors of water, acetone, and benzene, respectively. In creased for benzene, compared to that of the bare delay line.

Keywords:SAW Device;Silicalite Film;Vapor Phase Transport Method

[References]

Alberti K, Fetting F, Sens. Actuators B-Chem., 21, 39 (1994)
Amati D, Arn D, Blom N, Ehrat M, Saunois J, Widmer HM, Sens. Actuators B-Chem., 7, 587 (1992)
Battenberg A, Breidt VF, Vahrenkamp H, Sens. Actuators B-Chem., 30, 29 (1996)
Bein T, Brown K, Frye GC, Brinker J, J. Am. Chem. Soc., 111, 7640 (1989)
Chang SM, Tamiya E, Karube I, Sato M, Masuda Y, Sens. Actuators B-Chem., 5, 53 (1991)
Iwasaki A, Hirata M, Kudo L, Zeolites, 16, 35 (1996)
Kim MH, Jung MK, Rhee HK, Korean J. Chem. Eng., 12(4), 410 (1995)
Kim MH, Li HX, Davis ME, Microporous Mater., 1, 191 (1993)
Koegler JH, Zandbergen HW, Harteveld JLN, Nieuwenhuizen MS, Jansen JC, von Bekkum H, "Zeolites and Related Microporous Materials: State of the Art 1994, Studies in Surface Science and Catalysis, Vol. 84," Elsevier, Science B.V., 307 (1994)
Liron Z, Greenblatt J, Frishman G, Gratziani N, Sens. Actuators B-Chem., 12, 115 (1993)
Nieuwenhuizen MS, Harteveld JLN, Sens. Actuators B-Chem., 18-19, 502 (1994)
Ping W, Jun X, Sens. Actuators B-Chem., 37, 169 (1996)
Plog C, Manuz W, Kurzweil P, Sens. Actuators B-Chem., 24-25, 403 (1995)
Reinbold J, Buhlmann K, Cammann K, Wierig A, Wimmer C, Weber E, Sens. Actuators B-Chem., 18-19, 77 (1994)
Somov S, Reinhard G, Guth U, Gopel W, Sens. Actuators B-Chem., 35-36, 409 (1996)
Sun HT, Cheng TZ, Yao X, Sens. Actuators B-Chem., 13-14, 107 (1993)
Yuquan C, Wuming Z, Guang L, Sens. Actuators B-Chem., 20, 247 (1994)

[Referenced By]

[1] Alberti K, Fetting F, Sens. Actuators B-Chem., 21, 39 (1994)

[2] Amati D, Arn D, Blom N, Ehrat M, Saunois J, Widmer HM, Sens. Actuators B-Chem., 7, 587 (1992)

[3] Battenberg A, Breidt VF, Vahrenkamp H, Sens. Actuators B-Chem., 30, 29 (1996)

[4] Bein T, Brown K, Frye GC, Brinker J, J. Am. Chem. Soc., 111, 7640 (1989)

[5] Chang SM, Tamiya E, Karube I, Sato M, Masuda Y, Sens. Actuators B-Chem., 5, 53 (1991)

[6] Iwasaki A, Hirata M, Kudo L, Zeolites, 16, 35 (1996)

[7] Kim MH, Jung MK, Rhee HK, Korean J. Chem. Eng., 12(4), 410 (1995)

[8] Kim MH, Li HX, Davis ME, Microporous Mater., 1, 191 (1993)

[9] Koegler JH, Zandbergen HW, Harteveld JLN, Nieuwenhuizen MS, Jansen JC, von Bekkum H, "Zeolites and Related Microporous Materials: State of the Art 1994, Studies in Surface Science and Catalysis, Vol. 84," Elsevier, Science B.V., 307 (1994)

[10] Liron Z, Greenblatt J, Frishman G, Gratziani N, Sens. Actuators B-Chem., 12, 115 (1993)

[11] Nieuwenhuizen MS, Harteveld JLN, Sens. Actuators B-Chem., 18-19, 502 (1994)

[12] Ping W, Jun X, Sens. Actuators B-Chem., 37, 169 (1996)

[13] Plog C, Manuz W, Kurzweil P, Sens. Actuators B-Chem., 24-25, 403 (1995)

[14] Reinbold J, Buhlmann K, Cammann K, Wierig A, Wimmer C, Weber E, Sens. Actuators B-Chem., 18-19, 77 (1994)

[15] Somov S, Reinhard G, Guth U, Gopel W, Sens. Actuators B-Chem., 35-36, 409 (1996)

[16] Sun HT, Cheng TZ, Yao X, Sens. Actuators B-Chem., 13-14, 107 (1993)

[17] Yuquan C, Wuming Z, Guang L, Sens. Actuators B-Chem., 20, 247 (1994)