Advanced Materials, Vol.22, No.41, 4622-4627, 2010
Batch Fabrication of High-Performance Planar Patch-Clamp Devices in Quartz
The success of the patch-clamp technique has driven an effort to create wafer-based patch-clamp platforms. We develop a lithographic/electrochemical processing scheme that generates ultrasmooth, high aspect ratio pores in quartz. These devices achieve gigaohm seals in nearly 80% of trials, with the majority exhibiting seal resistances from 20-80 G Omega, competing with pipette-based patch-clamp measurements.