Various nanostructures are directly written by electron-beam-induced deposition using dimethyl-gold(III)-acetylacetonate as the precursor gas. After purification, their potential applications include plasmonic devices and metamaterials. Carbon contamination of the as-written structures can be completely removed by low-temperature ozone treatment, leaving polycrystalline pure gold structures (see figure). This treatment reduces the size of the nanostructures but does not substantially alter their functional shape.