화학공학소재연구정보센터
Applied Surface Science, Vol.257, No.9, 4317-4320, 2011
Fast epitaxial growth of a-axis- and c-axis-oriented YBa2Cu3O7-delta films on (100) LaAlO3 substrate by laser chemical vapor deposition
a-axis-and c-axis-oriented YBa2Cu3O7-delta (YBCO) films were epitaxially grown on (1 0 0) LaAlO3 substrates by laser chemical vapor deposition. The preferred orientation in the YBCO film changed from the a-axis to the c-axis with increasing laser powers from 77 to 158 W (the deposition temperatures from 951 to 1087 K). The a-axis-oriented YBCO film showed in-plane epitaxial growth of YBCO [0 0 1]//LAO[0 0 1],and the c-axis-oriented YBCO film showed that of YBCO [0 1 0]//LAO [0 0 1]. A c-axis-oriented YBCO film with a high critical temperature of 90 K was prepared at a deposition rate of 90 mu mh(-1), about 2-1000 times higher than that of metalorganic chemical vapor deposition. (c) 2010 Elsevier B. V. All rights reserved.