Anatase TiO2 nanoparticles incorporated DLC films were successfully deposited on single crystalline silicon substrates by the electrolysis of TiO2-methanol solution under ambient atmospheric pressure and low temperature. Anatase TiO2 nanoparticles were embedded into amorphous carbon matrix, forming the typical nanocrystalline/amorphous nanocomposite films, confirmed by transmission electron microscopy (TEM). TiO2 incorporation effectively increased the sp(3)-hybridized carbon concentration in the composite film, and further regulated the microstructure and surface morphology. Furthermore, the static contact testing completely displayed, TiO2 incorporation got the composite films super-hydrophilic, which fundamentally improved the wetting ability of DLC film. (C) 2011 Elsevier B.V. All rights reserved.