The magnetic and structural properties of InMnAs self-assembled dots and epitaxial layers prepared from the identical composition of the gas phase were investigated. All structures under study were grown by low pressure metal organic vapor phase epitaxy at the growth temperature of 500 degrees C. Magnetization measurements indicated that the Curie temperature of InMnAs dots prepared under the Stranski-Krastanov growth mode varied from 7 to 235 K in relation to the material composition. The Curie temperature of epitaxial layers prepared under layer by layer growth mode was found to be independent from the material composition. Transmission electron microscopy and microstructure analysis revealed that the dots have a zinc blende structure and they are plastically relaxed. (C) 2010 Elsevier B.V. All rights reserved.