In this article, we present orientation study of metallophthalocyanine (MPcs) (CoPc, ZnPc, CuPc, and MgPc) thin films deposited on silicon substrate. The MPc's thin layers were obtained by the quasi-molecular beam evaporation. The micro-Raman scattering spectra of MPc's thin films were investigated in the spectral range 550-1650 cm(-1) using 488 nm excitation wavelength. Raman scattering studies were performed at room temperature before and after annealing process. Annealing process of thin layers was carried out at 200 A degrees C for 6 h. From polarized Raman spectra using surface Raman mapping, the information on polymorphic phase of MPc's layers has been obtained. The chosen Raman modes A(1g) and B(1g) are connected with different polymorphic phases of MPc (alpha and beta form) thin layers. Moreover, the obtained results showed the influence of the annealing process on the ordering of the molecular structure. Following the annealing process, it was observed arrangement of the thin layers structure being revealed in Raman spectra. The obtained results indicate that the annealing process has a significant influence on the structure of thin layers being under study.