Epitaxial thin films of titanium perovskite oxyhydride ATiO(3-x)H(x) (A = Ba, Sr, Ca) were prepared by CaH2 reduction of epitaxial ATiO(3) thin films deposited on a (LaAlO3)(0.3)(SrAl0.5Ta0.5O3)(0.7) substrate. Secondary ion mass spectroscopy detected a substantial amount and uniform distribution of hydride within the film. SrTiO3/LSAT thin film hydridized at 530 degrees C for 1 day had hydride concentration of 4.0 X 10(21) atoms/cm(3) (i.e., SrTiO2.75H0.25). The electric resistivity of all the ATiO(3-x)H(x) films exhibited metallic (positive) temperature dependence, as opposed to negative as in BaTiO3-xHx powder, revealing that ATiO(3-x)H(x) are intrinsically metallic, with high conductivity of 10(2)-10(4) S/cm. Treatment with D-2 gas results in hydride/deuteride exchange of the films; these films should be valuable in further studies on hydride diffusion kinetics. Combined with the materials' inherent high electronic conductivity, new mixed electron/hydride ion conductors may also be possible.