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Journal of the Electrochemical Society, Vol.159, No.2, H147-H150, 2012
Effects of Carrier Concentration in the Back and Front Channels of Hf-In-Zn-O Thin Film Transistors
The effects of carrier concentrations in the front and back channels were comparatively studied in Hf-In-Zn-O thin film transistors by controlling the concentration of In. Although the field effect mobility is mainly controlled by the front channel composition, V-th is dominantly affected by the composition of the back channel. For instance, the use of an In-rich back channel that contains a large carrier concentration results in negatively shifted V-th while a relatively In-poor back channel that contains a small carrier concentration doesn't. Also, the V-th of an In-rich front channel device was near 0 V by applying an In-poor back channel. These results indicate that the adjustment of back channel carrier concentration and conductivity allows the control of V-th in Hf-In-Zn-O devices. (C) 2011 The Electrochemical Society. [DOI: 10.1149/2.050202jes] All rights reserved.