We report herein three unprecedented alkyltrichlorosilane surface modifiers bearing pentafluorophenyl ester (PFP), benzothiosulfonate (BTS), or novel beta-propiolactone (BPL) functionalizable terminal groups. Evidence is provided that these molecules can be prepared in very high purity (as assessed by NMR) through a last synthetic step of Pt-catalyzed alkene hydrosilylation then directly employed, without further purification, for the surface modification of quartz and medical grade stainless steel. Subsequent on-surface functionalizations with amine and thiol model molecules demonstrate the potential of these molecular adlayers to be important platforms for future applications in the bioanalytical and biomedical fields.