Continuous synthesis of SiC nanoparticles by RF thermal plasma method has been studied. Precursor mixtures comprised commercial silica powder and various types of carbon source including graphite, char, carbon black as well as the carbonaceous residue of tire pyrolyses. The obtained SIC consisted of nanosized particles that were crystallized mainly in beta phase with traces of alpha. The conversion rate of the silica precursor to SiC varied between 60% and 73% depending on the type of carbonaceous material and on the carbon excess. The main obstacle to achieve higher conversion is the rapid cooling of reactive species that can also be attributed to formation of nanosized particles. (C) 2011 Elsevier B.V. All rights reserved.