In this work, a column-like nano/micro-scale topography surface has been prepared via trichloro(octyl) silane (TCOS) vapor deposition on the air plasma oxidized polydimethylsiloxane (PDMSOx) surface. TCOS was mixed into n-heptyl alcohol and dimethyl-silicone oil to form a series of mixture. TCOS could anchor to the PDMSOx surface to form column-like nano/micro-scale topography while n-heptyl alcohol and TCOS volatilized to the PDMSOx surface in the subsequent vapor phase process. These surfaces were characterized by X-ray photoelectron spectroscopy (XPS), Fourier transform infrared-attenuated total reflection, contact angle measuring system and atomic force microscopy. It was shown that TCOS had been successfully assembled on the polydimethylsiloxane surface. N-heptyl alcohol mixed into alkylsiloxane could regulate the scale and roughness of column-like nano/micro-scale topography. (C) 2011 Elsevier B.V. All rights reserved.