In this study, (TiVCrZrHf)N multi-component coatings with quinary metallic elements were deposited by reactive magnetron sputtering system. The composition, structure, and mechanical properties of the coatings deposited at different N(2) flow rates were investigated. The (TiVCrZrHf) N coatings deposited at N(2) flow rates of 0, 1, and 2 SCCM showed an amorphous structure, whereas those deposited at N(2) flow rates of 4 and 6 SCCM showed a simple face-centered cubic solid solution structure. A saturated nitride coating was obtained for N(2) flow of 4 SCCM and higher. By increasing N(2) flow to 4 SCCM, the hardness and modulus reached a maximum value of 23.8 +/- 0.8 and 267.3 +/- 4.0 GPa, respectively. (C) 2011 Elsevier B. V. All rights reserved.