화학공학소재연구정보센터
Applied Surface Science, Vol.258, No.20, 8046-8048, 2012
Minority carrier lifetime enhancement in multicrystalline silicon by means of a dual treatment based on porous silicon and sputter-deposition of TiO2:Cr passivation layers
We report on a dual passivation approach of multicrystalline-silicon (mc-Si), which combines porous silicon (PS) treatment and sputter-deposition of TiO2:Cr passivation layer. At the optimal Cr content of 2 at.%, the effective minority carrier lifetime was found to be enhanced significantly by more than 2 orders of magnitude (from 2 to similar to 733 mu s). Our results demonstrate that this dual treatment not only provides strong passivation of the mc-Si substrate but decreases also the total surface reflectivity at 500 nm (from 40% for untreated mc-Si samples to similar to 19% for TiO2:Cr/PS treated ones). (c) 2012 Elsevier B.V. All rights reserved.