Zinc oxide (ZnO) nanowire (NW) arrays were grown on Si (100) substrate by metallorganic chemical vapor deposition via Zn[TMHD](2) as the precursor. Here we adopted two different procedures to grow ZnO NWs, namely, colloid and sputtered Au pre-deposition on Si (100) substrate. Comparative studies based on the morphology and growth behavior of ZnO NWs were performed. The grown ZnO NWs were characterized by field-emission scanning electron microscopy, atomic force microscopy, co-focal laser scanning microscopy, and Raman spectroscopy. (C) 2012 The Electrochemical Society. [DOI: 10.1149/2.007206esl] All rights reserved.