Hydrogen content in hydride at various depths is very important. In the present work hydrogen content in hydrogenated FeTi thin films has been investigated by ERDA (Elastic Recoil Detection Analysis) using 160 MeV, Ag-107 ions. ERDA investigations have shown that FeTi thin films without exposing hydrogen have about 59 atm% of hydrogen content and after hydrogenation these films acquire 5-10 atm% of additional hydrogen. It was observed that the hydrogenation of irradiated films did not increase the hydrogen concentration further. It implies than a beam did not cause track formation in the sample at this energy. (C) 2000 International Association for Hydrogen Energy,