Bio-applications of plasma have been widely studied in recent years. However, considering the high interests, the inactivation mechanisms of micro-organisms by plasma have not been clearly explained. The goal of this study was to find the sterilization mechanisms and define the major sterilization factors with the atmospheric pressure radio-frequency helium glow discharge. For the sterilization target the Escherichia coli was used. To begin with the sterilization study, the plasma characteristics were investigated by means of electrical and optical diagnostics. Especially, the gas temperature was controlled under 50 degrees C by keeping the input power less than 70 W to eliminate the thermal effects. Contribution of the UV irradiation from the plasma was studied and it turned out to be negligible. On the other hand, it was found that the sterilization was more effective up to 40% with only 0.15% oxygen addition to the helium supply gas. It indicates that the inactivation process was dominantly controlled by oxygen radicals, rather than heat or UV photons. (C) 2008 Elsevier B.V. All rights reserved.