We have fabricated In-x(S,O,OH)(y) films by chemical bath deposition (CBD). For the CBD of In-x(S,O,OH)(y) films, chemical solution containing InCl3, acetic acid (AA), thioacetamide(TA) was used. It was found that the reaction rate for In-x(S,O,OH) y was determined by concentrations of AA and TA. With higher concentration of AA, the starting time for film growth was increased, while with higher concentration of TA, it was decreased. After optimization of growth condition, we fabricated In-x(S,O,OH)(y) films on glass substrates for 25 min (25 min-ISOOH) and 30 min (30 min-ISOOH). The fabricated films were characterized by several techniques such as UV-visible spectroscopy, FTIR spectroscopy, atomic force microscopy and scanning electron microscopy. Based on these measurements, growth properties of 25min-ISOOH and 30min-ISOOH films are discussed. Crown Copyright (C) 2010 Published by Elsevier B.V. All rights reserved.