Growth of indium tin oxide (ITO) nanorods by sputtering without any use of templates or oblique angle deposition has been achieved. The morphology, optical and electrical properties of ITO nanorods obtained under different deposition conditions have been characterized. The deposition conditions resulting in high transmission and low sheet resistance have been determined. Dense ITO nanorod array has potential for application as a contact in light-emitting diodes. (C) 2010 Elsevier B.V. All rights reserved.