화학공학소재연구정보센터
Current Applied Physics, Vol.11, No.5, S9-S11, 2011
Characterisation of an RF power splitter for multi-tile PECVD systems application
Increasing the excitation frequency is known to enable higher deposition rates of Si films while maintaining solar cell efficiency. To circumvent wavelength effects, multi-tile systems are being developed. This technology requires more consideration be given to the power distribution, as all electrodes should be fed coherently. In particular, use of reliable, high-Q, low crosstalk, multi-port power dividers is crucial. The PSTLD is a novel, coaxial, divide-by-N, differential output power splitter operational in VHF/UHF bands. It enables power distribution to multi-tile plasma sources of arbitrary size. An RF characterisation of the splitter, along with detailed design considerations is reported. Effects of dispersion and dependence on plasma load impedance are presented based on proceeds of EM modelling.(1) (C) 2011 Elsevier B.V. All rights reserved.