Thin films of MgTiO3 high-k dielectric have been prepared by RF magnetron sputtering deposition at various substrate temperatures. X-ray diffraction, atomic force microscopy were used to characterize the deposited films. Experimental results show that substrate temperature has little effect on the stoichinometry. The electrical properties of MgTiO3 metal-insulator-metal (MIM) capacitors were investigated at various deposition temperatures, Pt/MgTiO3/Pt/SiO2/n-Si, were studied. It is shown that the MgTiO3 (210 nm) MIM capacitor fabricated at 200 degrees C shows an overall high performance, such as a high capacitance density of similar to 1.2 nF/um(2), a low leakage current of 1.51 x 10(-9) A/cm(2) at 5 V, low-voltage coefficients of capacitance, and good frequency dispersion properties. All of these indicate that the MgTiO3 MIM capacitors are very suitable for use in Si analog circuit application or dynamic random access memory (DRAM) cell. (C) 2011 Elsevier B.V. All rights reserved.