In order to improve the scanning speed of tapping mode AFM, we have studied the phase-detection mode AFM with a high frequency (1.5 MHz) cantilever. The phase shifts versus tip-sample distance with different types of samples including polymer, semiconductor, and graphite were measured and the interaction forces were analyzed. It was found that the phase shift in repulsive region is nearly linear as a function of distance, which can be used for feedback control in general, except that some blunt tips cause reversed polarity of phase shift due to excessive energy dissipation. High-speed image with scan rate of 100 Hz was obtained which were controlled with phase shift as a feedback signal. (C) 2012 Elsevier B.V. All rights reserved.