The semi-conductive poly(3-iodothiophene)(P3IT) films were fabricated by gas-phase polymerization through a chemical vapor deposition process. The P3IT nanoscale films have a high crystalline morphologies, and possessed a high Hall mobility up to 10 cm(2)/Vs. The degree of crystalline and the mobility values measured through Scanning Electron Microscopy, atomic force microscopy, and X-ray photoelectron spectroscopy with structural analysis. These conductive thin films, possessing polycrystalline structures, have a very high mobility and are capable of being applied to organic electronic layers for electrical devices such as the thin film transistors and organic photovoltaic cells. (c) 2012 Elsevier B.V. All rights reserved.