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|---|---|
| 1 |
Effects of Organic Additives in Ceria Slurry on Enhanced Oxide-to-Nitride Removal Selectivity in Shallow Trench Isolation Chemical Mechanical Polishing Byeong-Seog LEE, Hyun-Goo KANG, Kyung-Woong PARK, Ungyu PAIK, Jea-Gun PARK 한국재료학회 2006년 가을 학술대회 |
