| 번호 | 제목 |
|---|---|
| 2 |
Study of Slurry pH and oxidizer on Ge-doped SbTe film in PRAM CMP Soo-Beom Kima, Jong-Young Cho, Jae-Hyung Lima, Hee-Sub Hwang, Jin-Hyung Park, Eung-rim Hwang, Jea-Gun Park 한국재료학회 2012년 가을 학술대회 |
| 1 |
Role of H2O2 as oxidizer on the Ge-doped SbTe film for Chemical Mechanical polishing Sang-Hwa Woo, Jea-Gun Park, Jong-Young Cho, Hao Cui, Eung-Rim Hwang, Jin-Hyung Park 한국재료학회 2012년 가을 학술대회 |
