화학공학소재연구정보센터
번호 제목
2 Study of Slurry pH and Oxidizer on Ge-doped SbTe for High Speed PRAM CMP
Jun-Hee Shin, Jong Woong Baek, Sang Hwa Woo, Jin Hyung Park, Jea Gun Park
한국재료학회 2013년 가을 학술대회
1 Role of H2O2 as oxidizer on the Ge-doped SbTe film for Chemical Mechanical polishing
Sang-Hwa Woo, Jea-Gun Park, Jong-Young Cho, Hao Cui, Eung-Rim Hwang, Jin-Hyung Park
한국재료학회 2012년 가을 학술대회