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2 |
Study of Slurry pH and Oxidizer on Ge-doped SbTe for High Speed PRAM CMP Jun-Hee Shin, Jong Woong Baek, Sang Hwa Woo, Jin Hyung Park, Jea Gun Park 한국재료학회 2013년 가을 학술대회 |
1 |
Role of H2O2 as oxidizer on the Ge-doped SbTe film for Chemical Mechanical polishing Sang-Hwa Woo, Jea-Gun Park, Jong-Young Cho, Hao Cui, Eung-Rim Hwang, Jin-Hyung Park 한국재료학회 2012년 가을 학술대회 |